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EDWARDS Dry Pump System iXM

Aug. 26, 2022

EDWARDS Dry Pump System iXM

The following product

iXM1200

iXM600

iXM200

iXM200T

iXM1200T

iXM3000

 

Edwards iXM low energy series dry pumps can bring real process improvements with increased uptime, reduced environmental impact and cost benefits for your most critical applications.

 

Energy efficient roots mechanism can reduce input power by up to 60%, reducing environmental impact and lowering cost of ownership

Gas barrier technology and thermal design improvements enable four times greater corrosion resistance than our previous series

Compact and light-weight design, combined with exceptionally low noise and vibration, gives you more versatility

Advanced powder handling features deliver maximum reliability and extended pump life for multi-layer etch processes and reduced power consumption for CVD processes

Available with Xcede technology for enhanced corrosion resistance.